芯片制造工艺问答012：Pre-Clean的目的为何? 目前共有几种Pre-Clean recipe存在FAB内? 个别的目的有何不同?
Ans Pre-Clean 一般指 Pre furnace/RTP clean.Presently active Pre-clean have 22 recipes; while
dilute APM 1 recipe(see attach file: clean.xls) Pre-clean 为SPM,APM,HPM,HF 依个别需求调整使用时间之clean process, SPM is fo
